NingBo ZhongYiDa IMP & EXP Co.,Ltd
NingBo ZhongYiDa IMP & EXP Co.,Ltd Based on advance technology,create a bright future！
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Technical configuration (All our machine can be customized by your products and needs):
1. Chamber structure: vertical/horizontal front door structure or continuous coating line. Chamber adopts SUS304 material.size can be customer-made by your products.
2. Sputtering power supply :equipped with DC and medium frenquency power 60KW-100KW
3. Sputtering target: equipped with Aluminum or Titanium targets .
4. Transmission system:frequency control
5. Vacuum system: Diffusion pump (molecular pump is optional)+Roots pump +Mechanical pump + Rotary vane pump(cryogenic pump is optional)
6. Gas control: multi way sevenstar mass flow controller
7. Heating system:Controllable and adjustable from room temperature to 350 (PID temperature control).
9. Control mode: manual operation +semiautomatic + automatic integration / touch screen HMI + PLC
10 .Other technical parameters:
Pump time: 5*10-2pa<4mins
Ultimate vacuum:5*10-4pa
Water pressure≥0.2Mpa 3m3/h, water temperature≤25, gas pressure:0.4-0.8Mpa